The ORION NanoFab (ZEISS) is an ion microscope which allows for high resolution secondary electron (SE) imaging with a He+ beam and nanofabrication with Ne+, with focused probe sizes of 0.5 nm and 2 nm, respectively [1]. With the addition of the SIMS detector, this instrument provides in-situ elemental characterization at an unprecedented spatial resolution of ~15 nm, allowing a unique combination of in-situ modalities. The SIMS is a compact, double focusing magnetic sector mass spectrometer equipped with 4 Channel Electron Multipliers (CEMs) positioned in the same focal plane. The accessible mass range is 1 - 250 amu and the mass resolution M/DM >400 [2,3].
With the rapid development and evolution of the nanotechnology market, the combination of high-resolution correlative SE imaging with SIMS elemental mapping is particularly attractive for addressing the increasing need for exploration of nanofeatures. The NanoFab-SIMS has demonstrated recent success for the characterization of nanofeatures in the fields of perovskite materials [4], CIGS solar cells [5], nanotoxicology [6], batteries and nano-analytics in life science. We will present novel applications of this technology to research in the fields of nanomedicine, photonics and semi-conductor. Potential future prospective applications will also be discussed.