Oral Presentation 26th ACMM “2020 Visions in Microscopy”

Low Voltage Analytical Possibilities in a Scanning Electron Microscope in Transmission Mode at 30 kV: EDS, EELS and CBED at the Nano-scale (#81)

Raynald Gauvin 1 , Nicolas Brodusch 1
  1. McGill University, Montreal, QUEBEC, Canada

This paper will present state of the art results acquired with the Hitachi high Technologies SU-9000EA dedicated analytical STEM that works at 30 keV and less. It has a resolution of 0,22 nm in bright field STEM imaging mode at 30 keV without an aberration corrector. It is equipped with an Oxford Extreme SDD EDS detector that allows lithium detection. With EELS and EDS, results for Li detection will be presented and the challenges, in regards of quantification and beam damage, will be covered. Examples of EELS analysis at 30 keV for nano-materials will be presented as well, including surface plasmon imaging. The SU- 9000EA allows to perform electron diffraction and CBED patterns acquired at the nano-scale will be presented. Applications to grapheme oxide as well as Lithium based materials in Lithium Ion Batteries will be covered at depth.